@InProceedings{ReisBeloUeda:2005:PoSiOb,
               author = "Reis, J. C. N. and Beloto, Antonio Fernando and Ueda, M{\'a}rio",
                title = "Porous silicon obtained by anodic etching and implanted with 
                         helium by plasma immersio ion implantation",
                 year = "2005",
         organization = "Encontro Brasileiro de F{\'{\i}}sica dos Plasmas",
  conference-location = "Niter{\'o}i, RJ",
      conference-year = "27-30 nov.",
                label = "self-archiving-INPE-MCTI-GOV-BR",
        urlaccessdate = "13 maio 2024"
}